Thermo-pneumatically actuated, membrane-based micro-mirror devices

Journal of Micromechanics and Microengineering

Volumn 16, Issue 12, 2006, Pages 2524-2531

  Werber, Armin ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; COMPOSITE MICROMECHANICS; MIRRORS; PRESSURE EFFECTS; SILICON; SPIN COATING; THERMOPLASTIC ELASTOMERS;

MIRROR ARRAYS; SILICON SUBSTRATES; STROKE DEFLECTION; THERMOPNEUMATIC PRESSURE;

MICROACTUATORS;

EID: 33846056497     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/12/002     Document Type: Article

References (12)

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