Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coupled plasma

Physics of Plasmas

Volumn 15, Issue 7, 2008, Pages

  Huang, X J ^a   Xin, Y ^a   Yuan, Q H ^a   Ning, Z Y ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; EMISSION SPECTROSCOPY; GASES; HEATING; INDUCTIVELY COUPLED PLASMA; IONS; LEAKAGE (FLUID); LEAST SQUARES APPROXIMATIONS; MOLECULAR SPECTROSCOPY; NITROGEN; NONMETALS; OPTICAL EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; PLASMAS;

BULK PLASMA; CAPACITIVELY COUPLED PLASMA; COMBINED EFFECTS; EXCITING FREQUENCY; ION HEATING; LEAST-SQUARE PROCEDURES; LOW FREQUENCIES; LOWER FREQUENCIES; NITROGEN GASES; RESONANT HEATING; ROTATIONAL TEMPERATURES;

ELECTRIC DISCHARGES;

EID: 49149104507     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2952838     Document Type: Article

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