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Applied Physics Letters

Volumn 93, Issue 21, 2008, Pages

Optical nanolithography using a scanning near-field probe with an integrated light source

(5) Kingsley, James W a Ray, Sumon K a Adawi, Ali M a Leggett, Graham J a Lidzey, David G a

a UNIVERSITY OF SHEFFIELD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM ALLOYS; GALLIUM COMPOUNDS; GALLIUM NITRIDE; LIGHT EMITTING DIODES; LIGHT SOURCES; LIGHTING; NITRIDES; SEMICONDUCTING GALLIUM; ULTRAVIOLET RADIATION;

ATOMIC FORCE MICROSCOPE SYSTEMS; CANTILEVER ASSEMBLIES; INTEGRATED LIGHT SOURCES; MICRO LENSES; NEAR FIELDS; OPTICAL NANOLITHOGRAPHIES; OPTICAL PROBES; SUBWAVELENGTH APERTURES; ULTRAVIOLET LIGHTS;

LIGHT;

EID: 57049083478 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3032912 Document Type: Article

Times cited : (26)

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