Direct fabrication of nanoscale light emitting diode on silicon probe tip for scanning microscopy

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 4-10

  Hoshino, Kazunori ^a   Rozanski, Lynn J ^b   Vanden Bout, David A ^b   Zhang, Xiaojing ^a  

^a The University of Texas at Austin   (United States)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

Light emitting diodes (LEDs); Near field scanning optical microscopy (NSOM); Semiconductor nanoparticles

Indexed keywords

ELECTROLUMINESCENCE; FOCUSED ION BEAMS; HIGH INTENSITY LIGHT; MASKS; SCANNING; SILICON ON INSULATOR TECHNOLOGY; SILICON SENSORS; SILICON WAFERS; WET ETCHING;

ELECTRODE GAP; NEAR-FIELD SCANNING OPTICAL MICROSCOPY; PROBE TIP;

LIGHT EMITTING DIODES;

EID: 40449085463     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.910254     Document Type: Article

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