Extremely low-energy projectiles for SIMS using size-selected gas cluster ions

Applied Surface Science

Volumn 255, Issue 4, 2008, Pages 948-950

  Moritani, Kousuke ^a   Hashinokuchi, Michihiro ^a   Nakagawa, Jun ^b   Kashiwagi, Takahiro ^b   Toyoda, Noriaki ^a   Mochiji, Kozo ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b Toyama Co Ltd   (Japan)

Author keywords

Cluster size; Gas cluster ion beam; Non linear effect; Sputtering; TOF SIMS

Indexed keywords

ATOMS; CLUSTER ANALYSIS; GASES; ION BEAMS; KINETIC ENERGY; KINETICS; ORGANIC POLYMERS; PROJECTILES; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

ACCELERATION ENERGY; CLUSTER SIZES; GAS CLUSTER ION BEAMS; NONLINEAR EFFECT; SUBSTRATE MATERIAL; TIME OF FLIGHT METHODS; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY; TOF SIMS;

IONS;

EID: 56449095887     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.010     Document Type: Article

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