Development of a new cluster size selector

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 241, Issue 1-4, 2005, Pages 614-617

  Ohwaki, Kiyoto ^a   Dake, Yoshinori ^a   Toyoda, Noriaki ^b   Yamada, Isao ^b  

^a KAWASAKI HEAVY INDUSTRIES LTD   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster; Cluster ion; Cluster size; Gas cluster; Ion beam; Mass spectrometer; Selector

Indexed keywords

ELECTRODES; GAS DYNAMICS; MASS SPECTROMETRY; TARGETS; VELOCITY;

CLUSTER; CLUSTER ION; CLUSTER SIZE; GAS CLUSTER; SELECTORS;

ION BEAMS;

EID: 28044469654     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.07.110     Document Type: Conference Paper

References (1)

1. I. Yamada, J. Matsuo, Z. Insepov, T. Aoki, T. Seki, and N. Toyoda Nucl. Instr. and Meth. B 164-165 2000 944