Development of a size-selected gas cluster ion beam system for low-damage processing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 241, Issue 1-4, 2005, Pages 609-613

  Toyoda, Noriaki ^a   Houzumi, Shingo ^a   Yamada, Isao ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster ion; Crater formation; Damage; Size selection

Indexed keywords

GAS DYNAMICS; ION BOMBARDMENT; MAGNETIC FLUX; MASS SPECTROMETRY; SCANNING TUNNELING MICROSCOPY; SPECTROMETERS;

CLUSTER ION; CRATER FORMATION; DAMAGE; SIZE-SELECTION;

ION BEAMS;

EID: 28044458111     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.07.079     Document Type: Conference Paper

References (7)

1. T. Aoki, T. Seki, J. Matsuo, Z. Insepov, and I. Yamada Nucl. Instr. and Meth. B 153 1999 264
2. I. Yamada, J. Matsuo, N. Toyoda, and A. Kirkpatrick Mater. Sci. Eng. R 34 2001 231
3. N. Toyoda, M. Saito, N. Hagiwara, J. Matsuo, I. Yamada, in: Proceedings of 1998 International Conference on Ion Implantation Technology, 1999, p. 1234.
4. M.W. Matthew, R.J. Beuhler, M. Ledbetter, and L. Friedman Nucl. Instr. and Meth. B 14 1986 448
5. T. Seki, T. Kaneko, D. Takeuchi, T. Aoki, J. Matsuo, Z. Insepov, and I. Yamada Nucl. Instr. and Meth. B 121 1997 498
6. D. Takeuchi, T. Seki, T. Aoki, J. Matsuo, and I. Yamada Mater. Chem. Phys. 54 1998 76
7. T. Aoki, J. Matsuo, and G. Takaoka Nucl. Instr. and Meth. B 202 2003 278