Cluster size dependences of bombardment effects using mass-selected gas cluster ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 261, Issue 1-2 SPEC. ISS., 2007, Pages 660-663

  Nakamura, Kazuhiro ^a   Houzumi, Shingo ^a   Toyoda, Noriaki ^a   Mochiji, Kozo ^a   Mitamura, Toru ^a   Yamada, Isao ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster size; Gas cluster ion beam; Sputtering yield

Indexed keywords

CLUSTER SIZE; GAS CLUSTER ION BEAMS; SPUTTERING YIELD; THRESHOLD ENERGY;

GOLD; ION BEAMS; MONOMERS; PERMANENT MAGNETS; SPUTTERING;

ION BOMBARDMENT;

EID: 34447258680     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.04.268     Document Type: Article

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