Cluster size dependence on energy and velocity distributions of gas cluster ions after collisions with residual gas

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 662-665

  Toyoda, Noriaki ^a   Maeshima, Yuki ^a   Yamada, Isao ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster ion; Cluster size; Collision; Energy distribution

Indexed keywords

ELECTRIC POTENTIAL; ION BOMBARDMENT; KINETIC ENERGY; VACUUM; VELOCITY DISTRIBUTION;

CLUSTER ION; CLUSTER SIZE; ENERGY DISTRIBUTION;

ION BEAMS;

EID: 33947613492     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.069     Document Type: Article

References (5)

1. Yamada I., Matsuo J., Toyoda N., and Kirkpatrick A. Mat. Sci. Eng. R 34 (2001) 231
2. Insepov Z., and Yamada I. Nucl. Instr. and Meth. B 112 (1996) 16
3. Toyoda N., Matsui S., and Yamada I. Jpn. J. Appl. Phys. 41 (2002) 4287
4. Swenson D.R. Nucl. Instr. and Meth. B 241 (2004)
5. Toyoda N., Houzumi S., and Yamada I. Nucl. Instr. and Meth. B 241 (2005) 609