Materials challenges for CMOS junctions

Materials Research Society Symposium - Proceedings

Volumn 810, Issue , 2004, Pages 3-14

  Taylor, William J ^a   Rendon, Michael J ^a   Verret, Eric ^a   Jiang, Jack ^a   Capasso, Cristiano ^a   Sing, Dave ^a   Nguyen, Jen Yee ^a   Smith, James ^a   Luckowski, Eric ^a   Martinez, Arturo ^a   Schaeffer, Jamie ^a   Tobin, Phil ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CAPACITORS; CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; SEMICONDUCTOR DOPING; THIN FILM TRANSISTORS;

CAPACITOR DISCHARGE FLASH; CONTACT RESISTANCE; PARASITIC RESISTANCE; SOLID PHASE EPITAXY;

SEMICONDUCTOR JUNCTIONS;

EID: 5544294454     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-810-c1.1     Document Type: Conference Paper

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