SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 647, Issue , 2001, Pages

Simulations and Argon-cluster-ion smoothing of surfaces

(6) Fenner, D B a Dean, D W a DiFilippo, V a Allen, L P a Hautala, J a Mirkarimi, P B a

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; ION BEAMS; ION BOMBARDMENT; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; SURFACE MEASUREMENT; SURFACE ROUGHNESS;

ARGON CLUSTER ION BEAM; CLUSTER SMOOTHING MECHANISM; CONTINUUM RATE EQUATION; IMPACT TRANSIENT SURFACE DIFFUSION; PHENOMENOLOGICAL MODEL; SURFACE EVOLUTION;

ARGON;

EID: 16744365723 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (7)

References (13)

1
- 3242889480
- (1991) Phys. Rev. Lett. , vol.67 , pp. 1759
- Eklund, E.A.¹ Bruinsma, R.² Rudnick, J.³ Williams, R.S.⁴

2
- 0000416757
- (1956) Zeitscrift for Physik , vol.146 , pp. 133
- Becker, E.W.¹ Bier, K.² Henkes, W.³

3
- 0006632138
- (1996) Mat. Res. Soc. Symp. Proc. , pp. 396-427
- Yamada, I.¹ Matsuo, J.²

4
- 0034504740
- (2000) Mat. Res. Soc. Symp. Proc. , vol.585 , pp. 27
- Fenner, D.B.¹ Torti, R.P.² Allen, L.P.³ Toyoda, N.⁴ Kirkpatrick, A.R.⁵ Greer, J.A.⁶ DiFilippo, V.⁷ Hautala, J.⁸

5
- 0030563208
- (1996) Nuc. Instrum. Methods Phys. Res. B , vol.112 , pp. 16
- Insepov, Z.¹ Yamada, I.²

6
- 0001497736
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 981
- Insepov, Z.¹ Yamada, I.² Sosnowski, M.³

7
- 0033892605
- (2000) Nuc. Instrum. Methods Phys. Res. B , vol.161-163 , pp. 980
- Toyoda, N.¹ Hagiwara, N.² Matsuo, J.³ Yamada, I.⁴

8
- 0006715936
- (1999) J. Appl. Phys. , vol.86 , pp. 6758
- Kim, C.-K.¹ Kubota, A.² Economou, D.J.³

9
- 0006633802
- (1996) Mat. Sci. Eng. A , vol.217 A , pp. 89
- Insepov, Z.¹ Yamada, I.²

10
- 0033743265
- (2000) Nuc. Instrum. Methods Phys. Res. B , vol.164-165 , pp. 522
- Moseler, M.¹ Rattunde, O.² Nordiek, J.³ Haberland, H.⁴

11
- 0006672216
- (in press)
- Mat. Res. Soc. Symp. Proc. , vol.614
- Fenner, D.B.¹ Hautala, J.² Allen, L.P.³ Greer, J.A.⁴ Skinner, W.J.⁵ Budnick, J.I.⁶

12
- 0001040077
- (2000) Appl. Phys. Lett. , vol.77 , pp. 2243
- Mirkarimi, P.B.¹ Sterns, D.G.²

13
- 0006633803
- December; Las Vegas (in press)
- (2000) Intnl. Conf. Pro. Manuf. Adv. Mat. (THERMEC2000)
- DiFilippo, V.¹ Saigal, A.² Fenner, D.B.³ Allen, L.P.⁴ Hirvonen, J.K.⁵

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