Series resistance limits for 0.05 μm MOSFETs

Superlattices and Microstructures

Volumn 27, Issue 2, 2000, Pages 125-136

  Keys, P ^a,b   Gossmann, H J ^a   Ng, K K ^a   Rafferty, C S ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; ION IMPLANTATION; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS;

SERIES RESISTANCE;

MOSFET DEVICES;

EID: 0033734588     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1006/spmi.1999.0809     Document Type: Article

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