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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 B, 2002, Pages 4287-4290

Ultra-smooth surface preparation using gas cluster ion beams

(3) Toyoda, Noriaki a Matsui, Shinji a Yamada, Isao a

a UNIVERSITY OF HYOGO (Japan)

Author keywords

Cluster ion; Lateral sputtering; Scratch removal; Surface smoothing

Indexed keywords

ARGON; ATOMS; CHEMICAL MECHANICAL POLISHING; ION BEAMS; ION BOMBARDMENT; NANOSTRUCTURED MATERIALS; SPUTTER DEPOSITION; TARGETS;

GAS CLUSTER ION BEAMS (GCIB) PROCESSING;

SURFACE TREATMENT;

EID: 0036614420 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.4287 Document Type: Article

Times cited : (21)

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