High bandwidth control of precision motion instrumentation

Review of Scientific Instruments

Volumn 79, Issue 10, 2008, Pages

  Bristow, Douglas A ^a   Dong, Jingyan ^b   Alleyne, Andrew G ^b   Ferreira, Placid ^b   Salapaka, Srinivas ^b  

^a Architectural and Environmental Engineering   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; INSTRUMENTS; LEARNING ALGORITHMS; LEARNING SYSTEMS; SCANNING; TELECOMMUNICATION SYSTEMS; TRAJECTORIES; TWO TERM CONTROL SYSTEMS;

BANDWIDTH CONTROLS; DESIGN USES; FEEDBACK CONTROLLERS; FEEDFORWARD TECHNIQUES; HIGH BANDWIDTHS; ITERATIVE LEARNING CONTROLS; MOTION SYSTEMS; MULTIAXIS-; MULTIPLE SYSTEMS; NONSMOOTH; PRECISION IMPROVEMENTS; PRECISION MOTION CONTROLS; PRECISION MOTIONS;

DESIGN;

EID: 55349127406     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2980377     Document Type: Conference Paper

References (36)

1. D. Y. Abramovitch, S. B. Andersson, L. Y. Pao, and G. Schitter, Proceedings of the American Control Conference, 2007 (unpublished), pp. 3488-3502.
2. A. Alessandrini and P. Facci, Meas. Sci. Technol. 0957-0233 10.1088/0957-0233/16/6/R01 16, R65 (2005).
3. F. J. Giessibl, Rev. Mod. Phys. 0034-6861 10.1103/RevModPhys.75.949 75, 949 (2003).
4. J. Loos, Adv. Mater. (Weinheim, Ger.) 0935-9648 10.1002/adma.200500701 17, 1821 (2005).
5. Q. Yang and S. Jagannathan, Int. J. Nanotechnol. 3, 527 (2006).
6. M. Guthold, G. Matthews, A. Negishi, R. M. I. Taylor, D. Erie, F. P. Brooks, Jr., and R. Superfine, Proceedings of the Conference on Development and Industrial Application of Scanning Probe Methods, 1999 (unpublished), pp. 437-443.
7. M. Sitti and H. Hashimoto, IEEE/ASME Trans. Mechatron. 1083-4435 10.1109/3516.847093 5, 199 (2000).
8. A. A. G. Requicha, Proc. IEEE 0018-9219 10.1109/JPROC.2003.818333 91, 1922 (2003).
9. H. Chen, N. Xi, and G. Li, IEEE. Trans. Autom. Sci. Eng. 3, 208 (2006). 1545-5955
10. E. Eleftheriou, T. Antonakopoulos, G. K. Binnig, G. Cherubini, M. Despont, A. Dholakia, U. Durig, M. A. Lantz, H. Pozidis, H. E. Rothuizen, and P. Vettiger, IEEE Trans. Magn. 0018-9464 10.1109/TMAG.2003.808953 39, 938 (2003).
11. S. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka, Rev. Sci. Instrum. 0034-6748 10.1063/1.1499533 73, 3232 (2002).
12. Y. Li and J. Bechhoefer, Rev. Sci. Instrum. 0034-6748 10.1063/1.2403839 78, 013702 (2007).
13. K. K. Leang and S. Devasia, IEEE Trans. Control Syst. Technol. 15, 927 (2007). 1063-6536
14. S. Arimoto, S. Kawamura, and F. Miyazaki, J. Rob. Syst. 0741-2223 10.1002/rob.4620010203 1, 123 (1984).
15. K. L. Moore, Iterative Learning Control for Deterministic Systems (Springer, Berlin, 1993).
16. Z. Bien and J. -X. Xu, Iterative Learning Control: Analysis, Design, Integration and Applications (Kluwer, Dordrecht, 1998).
17. D. A. Bristow, M. Tharayil, and A. G. Alleyne, IEEE Control Syst. Mag. 0272-1708 10.1109/MCS.2006.1636313 26, 96 (2006).
18. K. K. Leang and S. Devasia, Mechatronics 0957-4158 10.1016/j. mechatronics.2005.11.006 16, 141 (2006).
19. Q. Yao, J. Dong, and P. M. Ferreira, Precis. Eng. 0141-6359 10.1016/j.precisioneng.2007.03.001 32, 7 (2008).
20. J. Dong, S. M. Salapaka, and P. M. Ferreira, Proceedings of the IEEE Conference on Decision and Control, 2008 (unpublished), pp. 4495-4500.
21. S. Skogestad and I. Postlethwaite, Multivariable Feedback Control: Analysis and Design (Wiley, New York, 1996).
22. S. Devasia, IEEE Trans. Autom. Control 0018-9286 10.1109/TAC.2002.804478 47, 1865 (2002).
23. Q. Zou, C. V. Giessen, J. Garbini, and S. Devasia, Rev. Sci. Instrum. 0034-6748 10.1063/1.1835011 76, 023701 (2005).
24. S. Tien, Q. Zou, and S. Devasia, IEEE Trans. Control Syst. Technol. 1063-6536 10.1109/TCST.2005.854334 13, 921 (2005).
25. K. -S. Kim, Q. Zou, and C. Su, Proceedings of the American Control Conference, 2007 (unpublished), pp. 4227-4233.
26. Y. Li and J. Bechhoefer, Proceedings of the American Control Conference, 2008 (unpublished), pp. 2703-2709.
27. K. -S. Kim and Q. Zou, Proceedings of the American Control Conference, 2008 (unpublished), pp. 2710-2715.
28. J. Dong, Q. Yao, and P. M. Ferreira, Precis. Eng. 0141-6359 10.1016/j.precisioneng.2007.03.002 32, 20 (2008).
29. M. Norrlof, Iterative Learning Control: Analysis, Design, and Experiments (Linkoping Studies in Science and Technology, 2000) Chap. 4, pp. 31-66.
30. M. K. Sain and J. L. Massey, IEEE Trans. Autom. Control 0018-9286 10.1109/TAC.1969.1099133 14, 141 (1969).
31. T. Sogo, Proceedings of the 41st IEEE Conference on Decision and Control, 2002 (unpublished), pp. 3730-3735.
32. C. -T. Chen, Linear System Theory and Design (Oxford University Press, Oxford, 1999).
33. M. A. Dahleh and I. J. Diaz-Bobillo, Control of Uncertain Systems: A Linear Programming Approach (Prentice-Hall, Englewood Cliffs, NJ, 1995).
34. R. W. Longman, Int. J. Control 0020-7179 10.1080/002071700405905 73, 930 (2000).
35. L. Cohen, Time-Frequency Analysis (Prentice-Hall, Englewood Cliffs, NJ, 1995).
36. D. A. Bristow and A. G. Alleyne, IEEE Trans. Autom. Control 53, 582 (2008). 0018-9286