CAD-guided automated nanoassembly using atomic force microscopy-based nonrobotics

IEEE Transactions on Automation Science and Engineering

Volumn 3, Issue 3, 2006, Pages 208-217

  Chen, Heping ^a,b   Xi, Ning ^a,c   Li, Guangyong ^a,c  

^a IEEE   (United States)

^b ABB INC   (United States)

^c Michigan State University   (United States)

Author keywords

Atomic force microscope (AFM); Computer aided design (CAD); Drift compensation; Nanoassembly; Nanomanipulation; Nanomanufacturing

Indexed keywords

DRIFT COMPENSATION; NANOASSEMBLIES; NANOMANIPULATION; NANOMANUFACTURING;

ADAPTIVE ALGORITHMS; ATOMIC FORCE MICROSCOPY; AUTOMATION; COMPUTER AIDED DESIGN; INTERACTIVE COMPUTER GRAPHICS; MATHEMATICAL MODELS; RANDOM PROCESSES; ROBOTICS; SELF ASSEMBLY;

NANOTECHNOLOGY;

EID: 33746401569     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2006.876907     Document Type: Review

References (22)

1. G. Binning, C. F. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol. 56, no. 9, pp. 930-933, 1986.
2. D. Wang, L. Tsau, K. L. Wang, and P. Chow, "Nanofabrication of thin chromium film deposited on si(100) surfaces by tip induced anodization in atomic force microscopy," Appl. Phys. Lett., vol. 67, pp. 1295-1297, 1995.
3. D. M. Schaefer, R. Reifenberger, A. Patil, and R. P. Andres, "Fabrication of two-dimensional arrays of nanometer-size clusters with the atomic force microscope," Appl. Phys. Lett., vol. 66, pp. 1012-1014, Feb. 1995.
4. T. Junno, K. Deppert, L. Montelius, and L. Samuelson, "Controlled manipulation of nanoparticles with an atomic force microscope," Appl. Phys. Lett., vol. 66, no. 26, pp. 3627-3629, Jun. 1995.
5. P. Avouris, T. Hertel, and R. Martel, "Atomic force microscope tip-induced local oxidation of silicon: Kinetics, mechanism, and nanofabncation," Appl. Phys. Lett., vol. 71, pp. 285-287, 1997.
6. R. Nemutudi, N. Curson, N. Appleyard, D. Ritchie, and G. Jones, "Modification of a shallow 2deg by AFM lithography," Solid-State Electron., vol. 57-58, pp. 967-973, 2001.
7. S. J. Ahn, Y. K. Jang, S. A. Kim, H. Lee, and H. Lee, "AFM nanolithography on a mixed 1b film of hexadecylamine and palmitic acid," Ultramicrocopy, vol. 91, pp. 171-176, 2002.
8. E. Dubois and J.-L. Bubbendorff, "Nanometer scale lithography on silicon, titanium, and pmma resist using scanning probe microscopy," Solid-State Electron., vol. 43, pp. 1085-1089, 1999.
9. M. Sitti and H. Hashimoto, "Tele-nanorobotics using atomic force microscope," in Proc. IEEE Int. Conf. Intelligent Robots and Systems, Victoria, BC, Canada, Oct. 1998, pp. 1739-1746.
10. M. Guthold, M. R. Falvo, W. G. Matthews, S. w. S. Paulson, and D. A. Erie, "Controlled manipulation of molecular samples with the nanomanipulator," IEEE/ASME Trans. Mechatron., vol. 5, no. 2, pp. 189-198, Jun. 2000.
11. A. A. G. Requicha, C. Baur, A. Bugacov, B. C. Gazen, B. Koel, A. Madhukar, T. R. Ramachandran, R. Resch, and P. Will, "Nanorobotic assembly of two-dimensional structures," in Proc. IEEE Int. Conf. Robotics and Automation, Leuven, Belgium, May 1998, pp. 3368-3374.
12. L. T. Hansen, A. Kuhle, A. H. Sorensen, J. Bohr, and P. E. Lindelof, "A technique for positioning nanoparticles using an atomic force microscope," Nanotechnology, vol. 9, pp. 337-342, 1998.
13. G. Y. Li, N. Xi, M. Yu, and W. K. Fung, "3-d nanomanipulation using atomic force microscope," in Proc. IEEE Int. Conf. Robotics and Automation, Taipei, Taiwan, R.O.C., Sep. 2003.
14. H. Chen, N. Xi, W. Sheng, and Y. Chen, "General framework of optimal tool trajectory planning for free-form surfaces in surface manufacturing," J. Manufact. Sci. Eng., Feb. 2005.
15. J. H. Makaliwe and A. A. G. Requicha, "Automatic planning of nanoparticle assembly tasks," in Proc. IEEE Int. Symp. Assembly and Task Planning, Fukuoka, Japan, May 2001, pp. 288-293.
16. B. Mokaberi and A. A. G. Requicha, "Toward automatic nanomanipulation: Drift compensation in scanning probe microscopes," in Proc. IEEE Int. Conf. Robotics and Automation, New Orleans, LA, Apr. 2004, pp. 416-421.
17. J. Israelachvili, Intermolecular and Surface Forces. London, U.K.: Academic Press London, 1991.
18. G. Y. Li, N. Xi, M. Yu, and W. K. Fung, "Modeling of 3D interactive forces in nanomanipulation," in Proc. IEEE/RSJ Int. Conf. Intelligent Robots and Systems, Las Vegas, NV, Nov. 2003.
19. P. M. Garth, Nonlinear Programming: Theory, Algorithm, and Applications. New York: Wiley, 1983.
20. M. Avriel, Nonlinear Programming: Analysis and Methods. Engle-wood Cliffs, NJ: Prentice-Hall, 1976.
21. G. Y. Li, N. Xi, H. Chen, A. Saeed, and M. Yu, "Assembly of nanos-tructure using AFM based nanomanipulation system," in Proc. IEEE Int. Conf. Robotics and Automation, New Orleans, LA, Apr. 2004, pp. 428-433.
22. G. Y. Li, N. Xi, and M. Yu, "Development of augmented reality system for AFM based nanomanipulation," IEEE/ASME Trans. Mechatron., vol. 9, no. 2, pp. 199-211, Jun. 2004.