Iteration-based scan-trajectory design and control with output-oscillation minimization: Atomic force microscope example

Proceedings of the American Control Conference

Volumn , Issue , 2007, Pages 4227-4233

  Kim, Kyong Soo ^a   Zou, Qingze ^a   Su, Chanmin ^b  

^a Iowa State University of Science and Technology   (United States)

^b VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION FORCE MEASUREMENTS; ATOMIC FORCE MICROSCOPE (AFM); CONVERGENCE (MATHEMATICS); DESIGN AND CONTROL; EXPERIMENTAL RESULTS; HIGH SPEEDS; ITERATIVE CONTROL; ITERATIVE CONTROL ALGORITHM; MODELING ERRORS; PIEZO ACTUATORS; PRACTICAL APPLICATIONS; PRACTICAL ISSUES; PRE FILTERING; SCAN METHODS; TRAJECTORY DESIGNS;

ERRORS; EXTREME ULTRAVIOLET LITHOGRAPHY; FLEXIBLE STRUCTURES; FORCE MEASUREMENT; ITERATIVE METHODS; MOTION ESTIMATION; PHOTOACOUSTIC EFFECT; TRAJECTORIES;

SCANNING;

EID: 44449159579     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2007.4282976     Document Type: Conference Paper

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