Design and characterization of Fabry-Pérot MEMS-based short-wave infrared microspectrometers

Journal of Electronic Materials

Volumn 37, Issue 12, 2008, Pages 1811-1820

  Keating, A J ^a   Antoszewski, J ^a   Silva, K K M B D ^a,b   Winchester, K J ^a,b   Nguyen, T ^a,c   Dell, J M ^a   Musca, C A ^a   Faraone, L ^a   Mitra, P ^d   Beck, J D ^d   Skokan, M R ^d   Robinson, J E ^d  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^b MRX Technologies   (Australia)

^c Origin Energy Australia   (Australia)

^d DRS Sensors and Targeting Systems Inc   (United States)

Author keywords

Fabry P rot resonators; Infrared detectors; Infrared image sensors; Infrared spectroscopy; Microelectromechanical devices; Photoconducting materials

Indexed keywords

ANALYTICAL MODELS; DESIGN EQUATIONS; DISTRIBUTED BRAGG MIRRORS; FIRST-ORDER; INFRARED; INFRARED IMAGE SENSORS; LINE-WIDTHS; LINEWIDTH BROADENING; MEASURED RESULTS; MICROELECTROMECHANICAL SYSTEMS; MICROSPECTROMETERS; MONOLITHIC INTEGRATIONS; OPTICAL CHARACTERISTICS; OPTICAL CHARACTERIZATIONS; SHORT-WAVE; STRESS GRADIENTS; SWITCHING TIMES; TUNING RANGES; WAVELENGTH RANGES;

COMPOSITE MICROMECHANICS; DETECTORS; ELECTROMECHANICAL DEVICES; INFRARED DETECTORS; INFRARED IMAGING; MEMS; MERCURY (METAL); MICROELECTROMECHANICAL DEVICES; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; PHOTOCONDUCTING MATERIALS; PHOTORESISTS; SENSOR NETWORKS; SPECTROSCOPIC ANALYSIS; TELLURIUM COMPOUNDS; WAVE FILTERS;

INFRARED SPECTROSCOPY;

EID: 54949084189     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-008-0526-0     Document Type: Article

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