CO2/H2O gas sensor with a Fabry-Perot filter

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 27-28

  Noro, M ^a   Suzuki, K ^a   Kishi, N ^a   Hara, H ^a   Watanabe, T ^a   Iwaoka, H ^a  

^a YOKOGAWA ELECTRIC CORPORATION   (Japan)

Author keywords

Fabry Perot Filter; gas sensor; NDIR

Indexed keywords

BANDPASS FILTERS; CARBON DIOXIDE; CHEMICAL SENSORS; GAS DETECTORS; INERTIAL CONFINEMENT FUSION; MOEMS;

ELECTROSTATICALLY DRIVEN; FABRY-PEROT FILTERS; GAS SENSING; NDIR; WAVELENGTH RANGES;

FABRY-PEROT INTERFEROMETERS;

EID: 84963756877     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031427     Document Type: Conference Paper

References (1)

1. K. Suzuki, et al., "Tunable Fabry-Perot Filter with Wide Wavelength Range," Proc. of Optical MEMS 2001, pp.105-106, 2001.