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Volumn 11, Issue 5, 2001, Pages 589-594
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Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer
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Author keywords
[No Author keywords available]
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Indexed keywords
HIGH TEMPERATURE OPERATIONS;
MICROELECTRONIC PROCESSING;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PRESSURE EFFECTS;
SEMICONDUCTOR DEVICE STRUCTURES;
SILICON NITRIDE;
STRESSES;
SURFACE TREATMENT;
ZINC SULFIDE;
FABRY PEROT CAVITIES;
INTRINSIC STRESS;
LOW PRESSURE CHEMICAL VAPOR DEPOSITION;
SACRIFICIAL LAYER;
SURFACE MICROMACHINING;
MICROELECTROMECHANICAL DEVICES;
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EID: 0035443958
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/11/5/323 Document Type: Article |
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Times cited : (51)
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References (15)
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