Optical characterization of Fabry-Pérot MEMS filters integrated on tunable short-wave IR detectors

IEEE Photonics Technology Letters

Volumn 18, Issue 9, 2006, Pages 1079-1081

  Keating, A J ^a   Silva, K K M B D ^a   Dell, J M ^a   Musca, C A ^a   Faraone, L ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Fabry P rot resonators; Infrared (IR) image sensors; Infrared (IR) spectroscopy; Microelectromechanical devices

Indexed keywords

HYPERSPECTRAL IMAGING; INFRARED (IR) IMAGE SENSORS; INFRARED (IR) SPECTROSCOPY; INFRARED IMAGES; IR BANDS; IR DETECTOR; MEMS FILTER; MICRO-ELECTRO-MECHANICAL; MICRO-SPECTROMETER; MONOLITHICALLY INTEGRATED; OPTICAL BAND WIDTH; OPTICAL CHARACTERIZATION; POTENTIAL APPLICATIONS; SHORT WAVES; SWITCHING TIME; VOLTAGE-TUNABLE; WAVELENGTH TUNING;

BANDWIDTH; DIGITAL IMAGE STORAGE; ELECTROMECHANICAL FILTERS; IMAGE SENSORS; MERCURY (METAL); MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL FILTERS; RESONATORS; TELLURIUM COMPOUNDS;

INFRARED SPECTROSCOPY;

EID: 35648995177     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2006.873467     Document Type: Article

References (10)

1. B. M. Onat, N. Masaun, W. Huang, M. Lange, and C. Dries, "Hyper-spectral imaging with MEMs integrated focal plane arrays," in Proc. SPIE-Int. Society Optical Engineering, Semiconductor Photodetectors II, vol. 5726, 2005, pp. 92-102.
2. J. Carrano, J. Brown, P. Perconti, and K. Barnard, "Tuning into detection," SPIE Oemagazine, pp. 20-22, Apr. 2004.
3. H. Saari, R. Mannila, J. Antila, M. Blomberg, O. Rusanen, J. Tenhunen, L. Wolf, and B. Harnisch, "Miniaturised gas sensor using a micromachined Fabry-Pérot interferometer," Preparing for the Future, vol. 10, no. 3, pp. 4-5, Oct. 2000.
4. P. Kotidis, W. Atia, M. Kuznetsov, S. Fawcett, D. Nislick, R. Crocombe, and D. C. Flanders, "Optical, tunable filter-based micro-instrumentation for industrial applications," in Proc. Instr. Syst. and Autom. Soc. (ISA) (EXPO 2003), Houston, TX, Oct. 21-23.
5. J. L. Miller, Principles of Infrared Technology. New York: Van Nostrand, 1994.
6. C. A. Musca, J. Antoszewski, K. J.Winchester, A. J.Keating, T. Nguyen, K. K. M. B. D. Silva, J. M. Dell, L. Faraone, P. Mitra, J. D. Beck, M. R. Skokan, and J. E. Robinson, "Monolithic integration of an infrared photon detector with aMEMS-based tunable filter," IEEE Electron. Device Lett., vol. 26, no. 12, pp. 888-890, Dec. 2005.
7. B. Dwir and G. Deutscher, "Structure and electrical properties of indium-germanium interfaces," Phys. Rev. B, vol. 40, no. 17, pp. 11 880-11 892, Dec. 15, 1989.
8. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. London, U.K.: Institute of Physics, 2001.
9. C. Roychouduri and M. Hercher, "Stable multipass Fabry-Pérot interferometer: Design and analysis," Appl. Opt., vol. 16, no. 9, pp. 2514-2520, Sep. 1997.
10. J. B. Starr, "Squeeze-film damping in solid-state accelerometers," in Tech. Dig. IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 1990, pp. 44-47.