Integrated diffraction grating for lab-on-a-chip microspectrometers

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5699, Issue , 2005, Pages 511-516

  Chen, Xianling ^a   McMullin, J N ^a   Haugen, C J ^a   Decorby, R G ^a  

^a NONE

Author keywords

Diffraction grating; Fluorescence detection; Lab on a chip; Microspectrometer; Optical waveguide; Transmission grating

Indexed keywords

COMPUTER SIMULATION; FLUORESCENCE; MICROELECTRONICS; MICROPROCESSOR CHIPS; MICROSCOPIC EXAMINATION; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SPECTROMETERS;

FLUORESCENCE DETECTION; LAB-ON-A-CHIP; MICROSPECTROMETER; TRANSMISSION GRATING;

DIFFRACTION GRATINGS;

EID: 21844434196     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.591231     Document Type: Conference Paper

References (11)

1. E. Verpoorte, "Chip vision - optics for microchips", Lab Chip, 3,42N-52N, 2003.
2. nd edition, Chapter 1, Springer, New York, 1998.
3. Z. Wang, J. El-Ali, M. Engelund, T. Gotsæd, I. R. Perch-Nielsen, K. B. Mogensen, D. Snakenborg, J. P. Kutter and A. Wolff, "Measurements of scattered light on a microchip flow cytometer with integrated polymer based optical elements", Lab Chip, 4, 372-377, 2004.
4. J. M. Ruano, D. Ortega, J. R. Bonar, A. J. McLaughlin, M. G. Jubber, J. M. Cooper and J. S. Aitchison, "Fabrication of integrated microanalytical chambers and channels for biological assays using flame hydrolysis deposition glass", Microelectronic Engineering, 46, 419-422, 1999.
5. D. Sander and J. Müller, "Self-focusing phase transmission grating for an integrated optical microspectrometer", Sensors and Actuators A, 88, 1-9, 2001.
6. J. H. Correia, G. Graaf, M. Bartek and R. F. Wolffenbuttel, "A single-chip CMOS optical microspectrometer with light-to-frequency converter and bus interface", IEEE Journal of Solid-State Circuits, 37, 1344-1347, 2002.
7. S. R. Bhalotra, H. L. Kung, D. Knip, P, H. Stiebig and D. A. B. Miller, "All-silicon standing-wave microspectrometer with tunable spectral resolution", in Proc. of IEEE International Conference on Optical MEMS, Waikoloa, HI, USA, August 2003.
8. W. Bacher, W. Menze and J. Mohr, "The LIGA technique and its potential for Microsystems-a survey", IEEE Transactions on Industrial Electronics, 42, 431-441, 1995.
9. R. F. Wolffenbuttel, "State-of-the-art in integrated optical microspectrometers", IEEE Transactions on Instrumentation and Measurement, 53, 197-202, 2004.
10. J. Liu, J. Zhu, G. Ding, X. Zhao and B. Cai, "Orthogonal method for processing of SU-8 resist in UV-LIGA", Micromachining and Microfabrication Process Technology VII, Jean Michel Karam, John Yasaitis (Editors), Proceedings of SPIE, 4557, 462-466, 2001.
11. th ed., Addison-Wesley, San Francisco, 2002.