Performance limits of a micromachined tunable-cavity filter

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 278-281

  Moon, Jung Sik ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Etalon; Fabry Perot Interferometer; MEMS; Multiphysics modeling; Surface Micromachining

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; FABRY-PEROT INTERFEROMETERS; HIGH TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; MULTIPLEXING; PERTURBATION TECHNIQUES; SENSORS;

ETALON; MULTIPHYSICS MODELING; SURFACE MICROMACHINING; TUNABLE-CAVITY FILTERS;

WAVE FILTERS;

EID: 6344294470     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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