Extending the tuning range of SWIR microspectrometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6542, Issue I, 2007, Pages

  Milne, Jason S ^a   Keating, Adrian J ^a   Antoszewski, Jarek ^a   Dell, John M ^a   Musca, Charles A ^a   Faraone, Lorenzo ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Fabry P rot; Infrared detector; Microelectromechanical systems

Indexed keywords

COVENTORWARE; MICROSPECTROMETER; OPTICAL LINEWIDTHS; STRESS GRADIENTS;

ACTUATORS; DIELECTRIC MATERIALS; MEMS; MICROWAVE SPECTROMETERS; MONOLITHIC INTEGRATED CIRCUITS; STRESS ANALYSIS;

INFRARED DETECTORS;

EID: 35648986738     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.718972     Document Type: Conference Paper

References (9)

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