Monolithic integration of an infrared photon detector with a MEMS-based tunable filter

IEEE Electron Device Letters

Volumn 26, Issue 12, 2005, Pages 888-890

  Musca, Charlie C ^a   Antoszewski, J ^a   Winchester, K J ^a   Keating, A J ^a   Nguyen, T ^a   Silva, K K M B D ^a   Dell, J M ^a   Faraone, L ^a   Mitra, P ^b   Beck, J D ^b   Skokan, M R ^b   Robinson, J E ^b  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^b DRS Sensors and Targeting Systems Inc   (United States)

Author keywords

Bragg; Detectors; Infrared (IR); Microelectromechanical system (MEMS); Silicon nitride; Tunable

Indexed keywords

DETECTORS; MIRRORS; PHOTOCONDUCTING DEVICES; SILICON NITRIDE; SPECTRUM ANALYSIS; TUNING;

BRAGG MIRRORS; ELECTROMAGNETIC SPECTRUM; MICROELECTROMECHANICAL SYSTEM (MEMS); PHOTOCONDUCTIVE DETECTORS; SHORT-WAVELENGTH INFRARED (SWIR); TUNABLE OPTICAL FILTER;

OPTICAL FILTERS;

EID: 29244455323     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2005.859651     Document Type: Article

References (8)

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