Micro-optical instrumentation for process spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5591, Issue , 2004, Pages 11-25

  Crocombe, Richard A ^a   Flanders, Dale C ^a   Atia, Walid ^a  

^a Axsun Technologies   (United States)

Author keywords

MEMS; Miniature; Near infrared; PAT; Process; Raman; Spectrometer

Indexed keywords

CHARGE COUPLED DEVICES; DRUG PRODUCTS; INFRARED SPECTROSCOPY; MICROELECTROMECHANICAL DEVICES; PROCESS CONTROL; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SENSORS; SIGNAL TO NOISE RATIO; SPECTROMETERS; STATISTICAL METHODS;

MINIATURE; NEAR-INFRARED; PROCESS; PROCESS ANALYTICAL TECHNOLOGY (PAT); RAMAN;

MICROOPTICS;

EID: 16644376740     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.578107     Document Type: Conference Paper

References (36)

1. United States Food and Drug Administration, Center for Drug Evaluation and Research, www.fda.gov/cder
2. J. J. Gunnell, and P. van Vuuren, "Process Analytical Systems: A Vision for the Future", Fourteenth International Forum Process Analytical Chemistry (Process Analysis & Control) - IFF AC 2000.
3. D. Christian Hassell, and Elizabeth Bowman, "Process Analytical Chemistry for Spectroscopists", Applied Spectroscopy 52, 19A-29A (1998).
4. See, e.g., A. Lee Smith, Applied Infrared Spectroscopy, John Wiley, 1979, pp 270-273.
5. Paul A. Wilks, "The Birth of Infrared Filtometry", Spectroscopy, 17, 14, March 2002.
6. Elmer D. Lipp, and M. Anne Leugers, "Applications of Raman Spectroscopy in the Chemical Industry", in '''Analytical Applications of Roman Spectroscopy", Michael J. Pelletier ed., Blackwell Science, 1999.
7. John Brittain Cooper, "Process Control Applications for Raman Spectroscopy in the Petroleum Industry", in "Analytical Applications of Raman Spectroscopy", Michael J. Pelletier ed., Blackwell Science, 1999.
8. Celia Henry, "Near-IR Gets the Job Done", Analytical Chemistry, 71, 625A-628A, (1999).
9. James P. Smith, "Spectrometers Get Small", Analytical Chemistry, 72, 853A-858A, (2000).
10. Paul Wilks, "Process Monitoring: Moving from the Laboratory to the Line", Spectroscopy, 19(9), 24-34, Sept. 2004.
11. Adrian Keating, Kevin Winchester, John M. Dell, Charlie Musca and Laura Faraone, "NIR microspectrometers -moving spectroscopy into the fridge", NIR News, 15(4), 11-15 (2004).
12. Reinoud F. Wolffenbuttel, "State-of-the-Art in Integrated Optical Microspectrometers", IEEE Trans. Instrum. Meas., 53, 197-202 (2004).
13. Jarek Antoszewski, John Dell, Thananjeyan Shivakumar, Mariusz Martyniuk, Kevin Winchester, Justin Wehner, Charlie Musca and Lorenzo Faraone, "Towards MEMS based infrared tunable micro-spectrometers", Proc. Soc. Photoinst.Opt. Eng. 4935, 148-155 (2002).
14. P. C. Montgomery, D. Montaner, O. Manzardo, M. Flury and H. P. Herzig, "The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy", Thin Solid Films, 450, 79-83 (2004).
15. Omar Manzardo, Hans Peter Herzig, Cornel R. Marxer and Nico F. de Roonij, "Miniaturized time-scanning Fourier transform spectrometer based on silicon technology", Optics Lett., 24, 1705-1707 (1999).
16. Omar Manzardo, Roland Michaely, Felix Schädelin, Wilfried Noell, Thomas Overstolz, Nico de Rooij and Hans Peter Herzig, "Miniature lamellar grating interferometer based on silicon technology", Optics. Lett. 29, 1437-1439 (2004).
17. G. Jodor, M. Sirota, H. Riris, W. Hasselbrack, "A MEMS-based Fourier transform spectrometer", Fourier Transform Spectroscopy, Optical Society of America Trends in Optics and Photonics, 84, 55-58 (2003).
18. Andrzej Barwicz, "Functional and technological integration of measurement microsystems", IEEE Instrumentation & Measurement Magazine, 7(2), 14-19, June 2004.
19. Peter Krippner, Thomas Kuehner, Juergen Mohr, and Volker Saile, "Microspectrometer system for the near-infrared wavelength range based on LIGA", Proc. SPIE, 3912, 141-149 (2000)
20. Jürgen A Mohr, Arndt Last, Uwe Hollenbach, Toru Oka and Ulrike Wallrabe, "A Modular Fabrication Concept for Microoptical Systems", Journal of Lightwave Technology, 21, 643-647 (2003)
21. Desmond Brennan, John Alderman, Linda Sattler, Barry O'Connor, and Cian O'Mathuna, "Issues in development of NIR microspectrometer system for on-line process monitoring of milk product", Measurement, 33, 67-74 (2003)
22. F. Gindele and C. Novotny, "Miniaturized fiber-coupled optical spectrometers with temperature compensation based on injection moulding", Proc SPIE, 4943, 47-58 (2003).
23. US Patent 6,341,039 B1, Flanders, Whitney and Miller, Flexible Membrane for Tunable Fabry-Perot Filter, Jan. 22, 2002.
24. E Fred Schubert, Light Emitting Diodes, Cambridge University Press, 2003, pp.283-287.
25. Charles E. Miller, "Chemical Principles of Near-Infrared Technology", Chapter 2 in Near Infrared Technology in the Agricultural and Food Industries, Phil Williams and Karl Norris, Eds., American Association of Cereal Chemists, St. Paul, Second Edition, 2001.
26. See, e.g., G. W. Chantry, Long Wave Optics, Academic Press, 1984, pp 62-74.
27. International Publication No. WO 01/37023, Flanders, Whitney, Masghati and Racz, Mounting and Alignment Structures for Optical Components, May, 2001.
28. International Publication No. WO 01/67149, Masghati, Racz, Payer and Flanders, Bonder Chuck and Optical Component Interface, September, 2001.
29. International Publication No. WO 01/37020, Flanders, Whitney, Optical Component Installation Process, May, 2001.
30. See, e.g., Peter R. Griffiths, and James A de Haseth, Fourier Transform Infrared Spectrometry, John Wiley, 1986, pp. 254-273.
31. -1", J. Chem. Phys., 89, 1988, 4638-4645.
32. Sarah L. Gilbert, William C Swann, and Dennis Tasshi, "Wavelength Control and Calibration for Wavelength Division Multiplexed Optical Communications", Proc. IEEE International Frequency Control Symposium, 122-126 (2001).
33. Philip L. Hanst, "Pollution: Trace Gas Analysis" in Fourier Transform Infrared Spectroscopy, Volume 2, John R. Ferraro and Louis J. Basile, eds., Academic Press, 1979.
34. D. R. Herriot, and H. J. Schulte, "Folded optical delay lines,' Appl. Opt., 4, 1965, 883-889.
35. Michael J. Pelletier, "Raman Instrumentation" in "Analytical Applications of Raman Spectroscopy", Michael J. Pelletier ed., Blackwell Science, 1999.
36. Cheryl M. Harris, "Raman on the Run", Analytical Chemistry, 75, 2003, 75A-79A.