Tunable Fabry-Perot filters operating in the 3 to 5 μm range for infrared micro-spectrometer applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Antoszewski, Jaroslaw ^a   Keating, Adrian ^a   Winchester, Kevin ^a   Nguyen, Thuyen ^a   Silva, Dilusha ^a   Musca, Charles ^a   Dell, John ^a   Samardzic, Olivia ^b   Faraone, Lorenzo ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^b DEFENCE SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

Fabry Perot filters; IR micro filters; IR sensors; Micro spectrometers

Indexed keywords

MICROMACHINING; MIRRORS; RESONANCE; SILICON NITRIDE; SPECTROMETERS;

ANTIREFLECTION COATING; BRAGG MIRRORS; FABRY-PEROT FILTERS; IR MICRO-FILTERS; IR SENSORS; MICRO-SPECTROMETERS;

OPTICAL FILTERS;

EID: 33746664300     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662539     Document Type: Conference Paper

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