Fabrication and integration of nanobolometer sensors on a MEMs process

Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008

Volumn 1, Issue , 2008, Pages 596-599

  Gilmartin, S F ^a   Arshak, K ^b   Collins, D ^a   Bain, D ^a   Lane, W A ^a   Korostynska, O ^b   Arshak, A ^b   McCarthy, B ^c   Newcomb, S B ^d  

^a ANALOG DEVICES   (Ireland)

^b UNIVERSITY OF LIMERICK   (Ireland)

^c UNIVERSITY COLLEGE CORK   (Ireland)

^d Glebe Scientific Ltd   (Ireland)

Author keywords

Etch; MEMs; Nanobolometer; Nanolithography; Sensor

Indexed keywords

BOLOMETERS; COMMERCE; DATA STORAGE EQUIPMENT; ELECTRIC REACTORS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; EXHIBITIONS; INFRARED DETECTORS; NANOSENSORS; NANOSTRUCTURED MATERIALS; SENSOR NETWORKS; SENSORS; THERMAL CONDUCTIVITY OF SOLIDS; TITANIUM;

ETCH; MEMS; NANOBOLOMETER; NANOLITHOGRAPHY; SENSOR;

NANOTECHNOLOGY;

EID: 53349156304     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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