Modeling, design and characterization of surface micromachined polysilicon microbolometers

IEEE Convention of Electrical and Electronics Engineers in Israel, Proceedings

Volumn 2002-January, Issue , 2002, Pages 56-57

  Socher, Eran ^a   Sinai, Yueda ^a   Degani, Ofir ^a   Nemirovsky, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 53349083851     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EEEI.2002.1178320     Document Type: Conference Paper

References (3)

1. B. E. Cole et al., Proc. IEEE Vol. 86, No. 8, August 1998, pp, 1679-1686.
2. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, J. MEMS Vol. 9, pp. 38-46, March 2000.
3. P. W. Kruse and D. S. Skatrud (editors), Semicon, and Semimetals Vol. 47, Academic Press (1997).