Highly sensitive infrared temperature sensor using self-heating compensated microbolometers

Sensors and Actuators, A: Physical

Volumn 79, Issue 2, 2000, Pages 122-127

  Ramakrishna, M V S ^a   Karunasiri, G ^a   Neuzil, P ^b   Sridhar, U ^b   Zeng, W J ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; HEAT CONDUCTION; MICROSENSORS; THERMAL CONDUCTIVITY OF SOLIDS; THERMOGRAPHY (IMAGING); THERMOGRAPHY (TEMPERATURE MEASUREMENT); THERMOMETERS; TITANIUM;

INFRARED TEMPERATURE SENSORS;

INFRARED DETECTORS;

EID: 0033908794     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00280-0     Document Type: Article

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