On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors

Sensors and Actuators, A: Physical

Volumn 116, Issue 1, 2004, Pages 137-144

  Scorzoni, Andrea ^a   Baroncini, Milena ^a   Placidi, Pisana ^a  

^a DIEI   (Italy)

Author keywords

Integrated metal resistor; Microheater; Microsensor

Indexed keywords

INTEGRATED METAL RESISTORS; JOULE HEATING; MICROHEATERS; TEMPERATURE COEFFICIENT OF RESISTANCE (TCR);

CHEMICAL SENSORS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; FINITE ELEMENT METHOD; HEAT TRANSFER; HEATING; INTERFEROMETERS; MICROMACHINING; MICROSENSORS; PASSIVATION; THERMAL CONDUCTIVITY;

RESISTORS;

EID: 4444322827     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.04.003     Document Type: Article

References (12)

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