The Experimental Study of High TCR Pt Thin Films for Thermal Sensors

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1002-1005

  Tsutsumi, Kazuhiko ^a   Yamashita, Akira ^a   Ohji, Hiroshi ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Alumina; Platinum thin film; TCR; Thermal sensor

Indexed keywords

ALUMINA; ANNEALING; HEAT RESISTANCE; HIGH TEMPERATURE EFFECTS; OXIDATION; PLATINUM; SILICON; THERMAL VARIABLES MEASUREMENT; THIN FILMS; VACUUM;

PLATINUM THIN FILMS; TEMPERATURE COEFFICIENT OF RESISTANCE (TCR); THERMAL SENSORS;

MICROSENSORS;

EID: 1542271426     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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