Simultaneous fabrication of nanocrystalline and {100} textured large-grained diamond films

Vacuum

Volumn 83, Issue 2, 2008, Pages 340-345

  Tang, C J ^a,b   Gracio J ^b   Fernandes, A J S ^a   Calisto, H ^b   Neves, A J ^a   Carmo, M C ^a  

^a UNIVERSITY OF AVEIRO   (Portugal)

^b UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

Microwave plasma chemical vapor deposition; N2 addition; Nanocrystalline diamond film; 100 textured large grained diamond film

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; DIAMONDS; ELECTROMAGNETIC WAVES; GAS DYNAMICS; GASES; INDUSTRIAL DIAMONDS; MECHANISMS; MICROWAVES; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOSTRUCTURED MATERIALS; NITROGEN; PLASMA DEPOSITION; RATE CONSTANTS; SUBSTRATES; SURFACE REACTIONS; SYNTHESIS (CHEMICAL);

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION; N2 ADDITION; NANOCRYSTALLINE DIAMOND FILM; {100} TEXTURED LARGE-GRAINED DIAMOND FILM;

DIAMOND FILMS;

EID: 51249109703     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.05.028     Document Type: Article

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