Formation of 〈110〉 texture during nanocrystalline diamond growth: An X-ray diffraction study

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 398-403

  Silva, F ^a,c   Benedic F ^a   Bruno, P ^a,b   Gicquel, A ^a  

^a CNRS   (France)

^b UNIVERSITY OF BARI   (Italy)

^c UNIVERSITÉ PARIS 13   (France)

Author keywords

Diamond film; Microstructure; Nanocrystalline; Plasma CVD

Indexed keywords

CRYSTALLINE MATERIALS; DIAMOND FILMS; GROWTH (MATERIALS); MATHEMATICAL MODELS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEXTURES; X RAY DIFFRACTION ANALYSIS;

DIAMOND GROWTH; EVOLUTION MODELS; FIBER TEXTURE; NANOCRYSTALLINE DIAMOND (NCD) FILMS;

DIAMONDS;

EID: 18444368140     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.11.019     Document Type: Conference Paper

References (30)

1. D.M. Gruen, X. Pan, A.R. Krauss, S. Liu, J. Luo, and C.M. Foster J. Vac. Sci. Technol., A, Vac. Surf. Films 12 1994 1491
2. D.M. Gruen Annu. Rev. Mater. Sci. 29 1999 211
3. D. Zhou, D.M. Gruen, L.C. Qin, T.G. McCauley, and A.R. Krauss J. Appl. Phys. 84 1998 1981
4. C. Moelle, M. Werner, F. Szücs, D. Wittorf, M. Sellschopp, and J. Von Borany Diamomd Relat. Mater. 7 1998 499
5. H. Eto, Y. Tamou, Y. Ohsawa, and N. Kikuchi Diamond Relat. Mater 1 1992 373
6. A. Erdemir, M. Halter, G.R. Fenske, A.R. Krauss, D.M. Gruen, and S.M. Pimenov Surf. Coat. Technol. 94-95 1997 537
7. C. Popov, W. Kulisch, P.N. Gibson, G. Ceccone, and M. Jelinek Diamond Relat. Mater 13 2004 1371
8. K. Kobashi, K. Nishimura, K. Miyata, K. Kumagai, and A. Nakaue J. Mater. Res. 5 1990 2469
9. V.I. Konov, A.A. Smolin, V.G. Rachenko, S.M. Pimenov, E.D. Obraztsova, and E.N. Loubnin Diamond Relat. Mater. 4 1995 1073
10. L.C. Nistor, J. Van Landuyt, V.G. Rachenko, E.D. Obraztsova, and A.A. Smolin Diamond Relat. Mater. 6 1997 159
11. F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau Diamond Relat. Mater. 5 1996 338
12. G. Lombardi, F. Bénédic, F. Mohasseb, K. Hassouni, and A. Gicquel Plasma Sources Sci. Technol. 13 2004 375
13. P. Bruno, F. Bénédic, F. Mohasseb, F. Silva, and K. Hassouni Thin Solid Films 2005 (in press)
14. P. Bruno, F. Bénédic, F. Mohasseb, G. Lombardi, F. Silva, and K. Hassouni J. Phys. D: Appl. Phys. 37 2004 L35
15. D. Ruer, A. Vadon, and R. Baro Texture Cryst. Solids 3 1979 245
16. A. Van der Drift Philips Res. Rep. 22 1967 267
17. C. Wild, P. Koild, W. Müller-Sebert, H. Walcher, R. Kohl, and N. Herres Diamond Relat. Mater. 2 1993 158
18. C. Wild, N. Herres, and P. Koidl J. Appl. Phys. 68 1990 973
19. R. Haubner, and B. Lux Int. J. Refract. Met. Hard Mater. 20 2002 93
20. C.J. Chu, R.H. Hauge, J.L. Margrave, and M.P. D'Evelyn Appl. Phys. Lett. 61 1992 1393
21. G. Janssen, PhD thesis, Nijmegen University, Netherlands, 1994.
22. R. Drosd, and J. Washburn J. Appl. Phys. 53 1982 397
23. D. Meakin, J. Stoemenos, P. Migliorato, and N.A. Economou J. Appl. Phys. 61 1987 5031
24. M. Joksch, P. Wurzinger, P. Pongratz, R. Haubner, and B. Lux Diamond Relat. Mater 3 1994 681
25. S. Jiao, A. Sumant, M.A. Kirk, D.M. Gruen, A.R. Krauss, and O. Aucellio J. Appl. Phys. 90 2001 118
26. L. Fayette, M. Mermoux, B. Marcus, F. Brunet, P. Germi, and M. Pernet Diamond Relat. Mater. 4 1995 1243
27. M.M.J. Treacy, J.M. Newman, and M.W. Deem Proc. R. Soc. Lond., A 433 1991 499
28. T.S. Yang, J.Y. Lai, C.L Cheng, and M.S. Wong Diamond Relat. Mater. 10 2001 2161
29. B. Lux, R. Haubner, H. Holzer, and R.C. De Vries Int. J. Refract. Met. Hard Mater. 15 1997 263
30. L.F. Trueb, and C.S. Barrett Am. Min. 57 1972 1664