Diamond materials for MEMS and NEMS structures and devices

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 474-477

  Butler, J E ^a   Feygelson, T ^b   Sekaric, L ^c   Craighead, H ^c   Wang, J ^d   Nguyen, C T C ^d  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

^c Department of Obstetrics Gynecology   (United States)

^d University of Michigan   (United States)

Author keywords

Diamond; MEMS; NEMS; Resonators

Indexed keywords

CHEMICAL STABILITY; DIAMOND GROWTH; GRAIN COARSENING; NUCLEATION LAYERS;

ANISOTROPY; DIAMOND FILMS; GRAIN SIZE AND SHAPE; HYDROGEN BONDS; MICROWAVES; NANOSTRUCTURED MATERIALS; NUCLEATION; RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344243248     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

1. Properties, Growth and Applications of Diamond, edited by M.H. Nazare and A.J. Neves, EMIS data review series. No. 26, INSPEC, UK.
2. R. W. Siegel and G.E. Fougere, in Nano-phase Materials (eds.G.C. Hadjipanayis and R.W. Siegel) 233-261 (Kluwer Academic Publishers, 1994).
3. R. Kuschnereit, P. Hess, D. Albert and W. Kulisch, Thin Solid Films 312, 66 (1997).
4. G. Lehmann, M. Schreck, L. Hou, J. Lambers, and P. Hess, Diam. Relat. Mater. 10, 686 (2001).
5. S. Jiao, A. Sumant, M.A. Kirk, D.M. Gruen, A.R. Krauss, and O. Auciello, J. Appl. Phys. 90, 118 (2001).
6. D.M. Gruen, Annu. Rev. Mater. Sci. 29, 211 (1999).
7. V.Y. Dolmatov, Russian Chemical Reviews 70, 607 (2001).
8. S. Rotter, Proceedings of the Applied Diamond Conference/Frontier Carbon Technologies - ADC/FCT '99, edited by M. Yoshikawa, Y. Koga, Y. Tzeng, C- P. Klages, and K. Miyoshi, (MYU K.K., Tokyo, 1999) pp.25.
9. R. Kalish, C. Saguy, and J.E. Butler, derived from SIMS analysis of films grown in the same reactor in the same time period; private communication.
10. th IEEE MEMS Conf., Las Vegas, January 2002, 657 (2002).
11. J. Wang, J. E. Butler, D. S. Y. Hsu, C. T.-C. Nguyen, Proc. Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head, June 2002, 65 (2002).
12. D. W. Carr, L. Sekaric, and H. G. Craighead, J. Vac. Sci. Technol. B 16, 3281 (1998).
13. L. Sekaric, D. W. Carr, S. Evoy, J. M. Parpia, H. G. Craighead, Sens. Actuators A (in press).
14. th Int. Conf. Solid-State Sensors and Actuators (Transducers 93), 7-10 June 1993, Yokohama, Japan, p. 296 (1993).
15. L. Sekaric, J.M. Parpia, H.G. Craighead, T. Feygelson, B.H. Houston, and J.E. Butler, Appl. Phys. Lett. 81, 4455 (2002).
16. J. Phillip, P. Hess, T. Feygelson, J.E. Butler, S. Chattopadhyay, K.H. Chen, and L.C. Chen, J. Appl. Phys., in press.