Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6544-6548

  Sandu, C S ^a   Benkahoul, M ^a   Parlinska Wojtan, M ^a   Sanjines R ^a   Levy F ^a  

^a EPFL   (Switzerland)

Author keywords

Nb2N; NbN; NbN; Crystal structure; Hardness; Morphology

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MORPHOLOGY; NIOBIUM COMPOUNDS; RESIDUAL STRESSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

COLUMNAR MORPHOLOGY; NANOINDENTATION MEASUREMENTS; NITROGEN PARTIAL PRESSURES; RELATIVE DENSITY;

THIN FILMS;

HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MORPHOLOGY; NIOBIUM COMPOUNDS; RESIDUAL STRESSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EID: 33646149635     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.054     Document Type: Article

References (17)

1. Toth L.E. Transition Metal Carbides and Nitrides (1971), Academic, New York
2. Wong M.S., Sproul W.D., Chu X., and Barnett S.A. J. Vac. Sci. Technol., A 11 (1993) 1528
3. Zhitomirsky V.N., Grimberg I., Rappport L., et al. Thin Solid Films 326 (1998) 134
4. Kim S.K., Cha B.C., and Yoo J.S. Surf. Coat. Technol. 177-178 (2004) 434
5. Torche M., Schmerber G., Guemmaz M., Mosser A., and Parlebas J.C. Thin Solid Films 436 (2003) 208
6. Bendavid A., Martin P.J., Kinder T.J., and Preston E.W. Surf. Coat. Technol. 163 (2003) 347
7. Havey K.S., Walck S.D., and Zabinski J.S. Thin Solid Films 303 1-2 (1997) 238
8. Hayashi N., Murzin I.H., Sakamoto I., and Ohkubo M. Thin Solid Films 259 2 (1995) 146
9. Klingenberg M.L., and Demaree J.D. Surf. Coat. Technol. 146-147 (2001) 243
10. Hollek H. Binäre und ternäre Carbid- und Nitridsysteme der Uebergangsmetalle (1984), Gebrüder Borntraeger, Berlin
11. Oya G., and Onodera Y. J. Appl. Phys. 45 (1974) 1389
12. Oya G., and Onodera Y. J. Appl. Phys. 47 (1976) 2833
13. Sundgren J.-E., and Hentzell H.T.G. J. Vac. Sci. Technol., A 4 5 (1986) 2259
14. Benkahoul M., Martinez E., Karimi A., Sanjinés R., and Lévy F. Surf. Coat. Technol. 180-181 (2004) 178
15. Sanjinés R., Benkahoul M., Sandu C.S., Schmid P.E., and Lévy F. Thin Solid Films 494 1-2 (2006) 190
16. Brauer G., and Esselborn R. Z. Anorg. Allg. Chem. 309 (1961) 151
17. Denker S.P. J. Less-Common Met. 14 (1968) 1