TiN/NbN superlattice hard coatings deposited by unbalanced magnetron sputtering

Surface and Coatings Technology

Volumn 113, Issue 1-2, 1999, Pages 75-79

  Zeng, X T ^a  

^a NONE

Author keywords

Hardness; TiN NbN superlattice coatings; Unbalanced magnetron sputtering

Indexed keywords

ELASTICITY; HARDNESS; MAGNETRON SPUTTERING; METALLIC FILMS; METALLIC SUPERLATTICES; SPUTTER DEPOSITION; STOICHIOMETRY; SUBSTRATES; TITANIUM COMPOUNDS; TOOL STEEL; TOUGHNESS; TRIBOLOGY;

HARD COATINGS; NANO-INDENTATION HARDNESS; UNBALANCED MAGNETRON SPUTTERING;

PROTECTIVE COATINGS;

EID: 0032663924     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00825-1     Document Type: Article

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