Properties of niobium nitride coatings deposited by cathodic arc physical vapor deposition

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3670-3674

  Cansever, N ^a  

^a YILDIZ TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Adhesion; Cathodic arc physical vapor deposition; Hardness; Mechanical properties; Microstructure; Niobium nitride

Indexed keywords

CATHODES; ELECTRIC ARCS; MICROSTRUCTURE; NIOBIUM COMPOUNDS; PHYSICAL VAPOR DEPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

BIAS VOLTAGE; CATHODIC ARC PHYSICAL VAPOR DEPOSITION; NIOBIUM NITRIDE; STEEL SUBSTRATE;

ORGANIC COATINGS;

EID: 33846926347     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.133     Document Type: Article

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