The influence of the magnetic field configuration on plasma parameters and microstructure of niobium nitride films

Surface and Coatings Technology

Volumn 201, Issue 13, 2007, Pages 6117-6121

  Rodil, S E ^a   Olaya, J J ^b   Muhl, S ^a   Bhushan, B ^c   Wei, G ^c  

^a INSTITUTO DE INVESTIGACIONES EN MATERIALES   (Mexico)

^b UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

^c MEMS   (United States)

Author keywords

Nanoindentation; Niobium nitride; Plasma diagnostics; Unbalanced magnetron sputtering

Indexed keywords

ELASTIC MODULI; ELECTRIC CONDUCTIVITY; HARDNESS; INDENTATION; MAGNETIC FIELDS; NIOBIUM COMPOUNDS; PLASMA DENSITY; PLASMAS; SUPERCONDUCTING TRANSITION TEMPERATURE;

CHEMICAL INERTNESS; MELTING POINT; NIOBIUM NITRIDE;

INORGANIC COATINGS;

ELASTIC MODULI; ELECTRIC CONDUCTIVITY; HARDNESS; INDENTATION; INORGANIC COATINGS; MAGNETIC FIELDS; NIOBIUM COMPOUNDS; PLASMA DENSITY; PLASMAS; SUPERCONDUCTING TRANSITION TEMPERATURE;

EID: 33846834104     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.120     Document Type: Article

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