The effect of transport ration and ion energy on the mechanical properties of IBAD niobium nitride coatings

Surface and Coatings Technology

Volumn 146-147, Issue , 2001, Pages 243-249

  Klingenberg, M L ^a   Demaree, J D ^b  

^a Mfg Technologies Directorate   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Ion beam assisted deposition (IBAD); Niobium nitride films; Nitrogen ion beams

Indexed keywords

ELECTRON BEAMS; ION BEAM ASSISTED DEPOSITION; MICROSTRUCTURE; NIOBIUM COMPOUNDS; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS;

ION ENERGY;

COATING TECHNIQUES;

COATING; DEPOSITION; HARDNESS; NIOBIUM; WEAR RESISTANCE;

EID: 17444440583     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01393-7     Document Type: Article

References (21)