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Volumn 108, Issue 10, 2008, Pages 1021-1024

Local anodic oxidation by AFM tip developed for novel semiconductor nanodevices

Author keywords

Atomic force microscope; Computer simulations; Local anodic oxidation; Mesoscopic and nanoscale systems; Nanooxidation

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL OXYGEN DEMAND; ELECTRIC CONDUCTIVITY; ELECTRIC FIELD EFFECTS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; ELECTRON GAS; ENERGY BARRIERS; EXTREME ULTRAVIOLET LITHOGRAPHY; HETEROJUNCTIONS; IMAGING TECHNIQUES; MOS CAPACITORS; NANOSTRUCTURED MATERIALS; OPTICAL DESIGN; OXIDATION; SEMICONDUCTOR MATERIALS; TECHNOLOGY;

EID: 49949100059     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.04.032     Document Type: Article
Times cited : (9)

References (19)
  • 19
    • 49949099848 scopus 로고    scopus 로고
    • J. Martaus, D. Gregušová, V. Cambel, R. Kúdela, J. Šoltýs, J. Ultramicroscopy (2008), doi:10.1016/j.ultramic.2008.04.053.
    • J. Martaus, D. Gregušová, V. Cambel, R. Kúdela, J. Šoltýs, J. Ultramicroscopy (2008), doi:10.1016/j.ultramic.2008.04.053.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.