AFM nanooxidation process - Technology perspective for mesoscopic structures

Surface Science

Volumn 601, Issue 13, 2007, Pages 2717-2723

  Cambel, V ^a   Martaus, J ^a   Soltys J ^a   Kudela R ^a   Gregusova D ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

Atomic force microscope; Finite element method; GaAs AlGaAs heterostructure; Local anodic oxidation; Nanotechnology

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; ELECTRON GAS; ENERGY BARRIERS; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; THERMAL EFFECTS;

GAAS/ALGAAS HETEROSTRUCTURE; LOCAL ANODIC OXIDATION;

HETEROJUNCTIONS;

EID: 34250747865     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.12.058     Document Type: Article

References (19)

1. Šoltýs J., Cambel V., and Fedor J. Acta Phys. Pol. A 103 (2003) 553
2. Snow E.S., Park D., and Campbell P.M. Appl. Phys. Lett. 69 (1996) 269
3. Matsumoto K., Ishii M., Segawa K., Oka Y., Vartanian B.J., and Harris J.S. Appl. Phys. Lett. 68 (1996) 34
4. Fuhrer A., Dorn A., Lüscher S., Heinzel T., Ensslin K., Wegscheider W., and Bichler M. Superlattices Microst. 31 (2002) 19
5. Gómez-Monivas S., Sáenz J.J., Calleja M., and García R. Phys. Rev. Lett. 91 (2003) 056101
6. Garcia R., Calleja M., and Rohrer H. J. Appl. Phys. 86 (1999) 1898
7. Mailly D., Chapelier C., and Benoit D. Phys. Rev. Lett. 70 (1993) 2020
8. Reulet B., Ramin M., Bouchiat H., and Mailly D. Phys. Rev. Lett. 75 (1995) 124
9. Morimoto K., Araki K., Yamashita K., Morita K., and Niwa M. Appl. Surf. Sci. 117/118 (1997) 652
10. Perez-Murano F., Abadal G., Barniol N., Ayemerich X., Servat J., Gorostiza P., and Sanz F. J. Appl. Phys. 78 (1995) 6797
11. Dagata J.A., Inoue T., Itoh J., Matsumoto K., and Yokoyama H. J. Appl. Phys. 84 (1998) 6891
12. Graf D., Frommenwiller M., Studerus P., Ihn T., Ensslin K., Driscoll D.C., and Gossard A.C. J. Appl. Phys. 99 (2006) 053707
13. Hu X., Guo T., Fu X., and Hu X. Appl. Surf. Sci. 217 (2003) 34
14. Cambel V., Šoltýs J., Moško M., and Kúdela R. Superlattice Microst. 36 (2004) 359
15. Cambel V., Šoltýs J., Martaus J., and Moško M. J. Phys. IV 132 (2006) 171
16. Cambel V., and Moško M. Semicond. Sci. Technol. 8 (1993) 364
17. Moško M., Mošková A., and Cambel V. Phys. Rev. B 51 (1995) 16860
18. Luna M., Colchero J., and Baró A.M. Appl. Phys. Lett. 72 (1998) 3461
19. .