Direct observations of thermally induced structural changes in amorphous silicon carbide

Journal of Applied Physics

Volumn 104, Issue 3, 2008, Pages

  Ishimaru, Manabu ^a   Hirata, Akihiko ^a   Naito, Muneyuki ^a   Bae, In Tae ^b   Zhang, Yanwen ^b   Weber, William J ^b  

^a OSAKA UNIVERSITY   (Japan)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DISTRIBUTION FUNCTIONS; ELECTRON ENERGY LOSS SPECTROSCOPY; HIGH ENERGY PHYSICS; IN SITU PROCESSING; ION BOMBARDMENT; MATERIALS SCIENCE; NONMETALS; OPTICAL GLASS; SILICON; SILICON CARBIDE; STRUCTURAL RELAXATION;

AMORPHOUS SIC; AMORPHOUS SILICON CARBIDE; BULK MATERIALS; CHEMICAL SHORT-RANGE ORDER; CROSS-SECTIONAL TEM; HIGH-ENERGY IONS; IN SITU TRANSMISSION ELECTRON MICROSCOPY; IN-SITU TEM; RADIAL DISTRIBUTION FUNCTION ANALYSIS; SIC SUBSTRATES; SINGLE-CRYSTALLINE; STRUCTURAL CHANGES; VOLUME REDUCTION;

AMORPHOUS SILICON;

EID: 49749114039     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2960342     Document Type: Article

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