Recrystallization of MeV Si implanted 6H-SiC

Applied Physics Letters

Volumn 69, Issue 23, 1996, Pages 3534-3536

  Harada, Shinsuke ^a   Ishimaru, Manabu ^a   Motooka, Teruaki ^a   Nakata, Toshitake ^b   Yoneda, Tomoaki ^b   Inoue, Morio ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b Ion Eng Res Institute Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001175016     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117236     Document Type: Article

References (8)

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8. M. Ishimaru, S. Harada, T. Motooka, T. Nakata, T. Yoneda, and M. Inoue (unpublished).