Electron-beam-induced amorphization in SiC

Physical Review B - Condensed Matter and Materials Physics

Volumn 68, Issue 14, 2003, Pages

  Ishimaru, Manabu ^a   Bae, In Tae ^a   Hirotsu, Yoshihiko ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON CARBIDE;

AMORPHIZATION; ARTICLE; ATOM; CHEMICAL REACTION; ELECTRON BEAM; FIELD EMISSION; IRRADIATION; ROOM TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

EID: 2442597698     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.68.144102     Document Type: Article

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