Computational study of anisotropic epitaxial recrystallization in 4H-SiC

Journal of Physics Condensed Matter

Volumn 20, Issue 12, 2008, Pages

  Gao, F ^a   Zhang, Y ^a   Posselt, M ^b   Weber, W J ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; COMPUTATIONAL METHODS; COMPUTER SIMULATION; MOLECULAR DYNAMICS; SILICON CARBIDE;

ANISOTROPIC EPITAXIAL RECRYSTALLIZATION; POLYTYPIC STRUCTURE;

CRYSTALLIZATION;

EID: 40549135973     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/20/12/125203     Document Type: Article

References (27)

1. Bolse W 1999 Nucl. Instrum. Methods Phys. Res. B 148 83
2. Minato K, Sawa K, Koya K, Tomita T, Ishikawa A, Baldwin C A, Gabbard W A and Malone C M 2000 Nucl. Technol. 131 36
3. Lake J A, Bennett R G and Kotek J F 2002 Sci. Am. 286 73
4. Chow T P 2000 Progress in SiC high-voltage power switching devices UPD2000: 1st Int. Workshop on Ultra-Low-Loss Power Device Technology (Nara, May-June)
5. Davies R F, Kelner G, Shur M, Palmour J W and Edmond J A 1991 Proc. IEEE 79 677
6. Hallén A, Janson M S, Kuznetsov A Yu, berg D, Linnarsson M K, Svensson B G, Persson P O, Carlsson F H C, Storasta L, Bergman J P, Sridhara S G and Zhang Y 2002 Nucl. Instrum. Methods B 186 186
7. Bohn H G, Williams J M, Mchargue C J and Begun G M 1987 J. Mater. Res. 2 107
8. Heera V, Stoemenos J, Kögler R and Skorupa W 1995 J. Appl. Phys. 77 2999
9. Ivashchenko V I, Turchi P E A, Shevchenko V I, Ivashchenko L A and Rusakov G V 2002 Phys. Rev. B 66 195201
10. Rino J P, Ebbsj I, Branicio P S, Kalia R K and Nakano A 2004 Phys. Rev. B 70 045207
11. Szlufarska I, Kalia R K, Nakona A and Vashishta P 2005 Phys. Rev. B 71 174113
12. Szlufarska I, Nakano A and Vashishta P 2005 Science 309 911
13. Gao F, Devanathan R, Zhang Y, Posselt M and Weber W J 2006 J. Mater. Res. 21 1420
14. Gao F, Devanathan R, Zhang Y and Weber W J 2005 Nucl. Instrum. Methods B 228 282
15. Gao F, Zhang Y, Posselt M and Weber W J 2006 Phys. Rev. B 74 104108
16. Satoh M, Okamoto K, Nakaike Y, Kuriyama K, Kanaya M and Ohtani N 1999 Nucl. Instrum. Methods B 148 567
17. Satoh M, Hitomi T and Suzuki T 2006 Nucl. Instrum. Methods B 242 627
18. Finnis M W 1988 A molecular dynamics program for simulation of pure metals UKAEA Report, No. AERER 13182
19. Gao F and Weber W J 2002 Nucl. Instrum. Methods B 191 504
20. Ziegler J F, Biersack J P and Littmark U 1985 The Stopping and Range of Ions in Matter (New York: Pergamon)
21. Yuan Y and Hobbs L W 2002 Nucl. Instrum. Methods Phys. Res. B 191 74
22. Marqués L A, Caturla M J, Diaz de la Rubia T and Gilmer G H 1996 J. Appl. Phys. 80 6160
23. Gao F, Zhang Y, Devanathan R, Posselt M and Weber W J 2007 Nucl. Instrum. Methods B 255 136
24. Zhang Y, Weber W J, Jiang W, Wang C M, Hallén A and Possnert G 2003 J. Appl. Phys. 93 1954
25. Pirouz P and Yang W J 1992 Ultramicroscopy 51 189
26. Gao F and Weber W J 2003 J. Appl. Phys. 94 4348
27. Gao F, Weber W J, Posselt M and Belko V 2004 Phys. Rev. B 69 245205