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Journal of Applied Physics

Volumn 104, Issue 2, 2008, Pages

High-resolution nanofabrication using a highly focused electron beam

(3) Aref, Thomas a Remeika, Mikas a Bezryadin, Alexey a

a University of Illinois at Urbana Champaign (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; ELECTRIC WIRE; ELECTRON BEAMS; ELECTRON GUNS; ELECTRON OPTICS; NANOSTRUCTURED MATERIALS; NIOBIUM; OPTICAL DESIGN; PARTICLE BEAMS; TRANSITION METALS;

ELECTRON BEAM ETCHING; FOCUSED ELECTRON BEAMS; GRAPHENE; HIGH RESOLUTIONS; MULTI-WALLED CARBON NANOTUBES; NANO-DEVICES; NANO-FABRICATION; NANO-HOLES; SINGLE ATOMS;

MULTIWALLED CARBON NANOTUBES (MWCN);

EID: 48849093126 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2957590 Document Type: Article

Times cited : (34)

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