Molecular implants for advanced devices

Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007

Volumn , Issue , 2007, Pages 113-118

  Rubin, Leonard M ^a   Ameen, Michael S ^a   Harris, Mark A ^a   Huynh, Chuong ^a  

^a AXCELIS TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); POLYSILICON;

BEAM CURRENTS; DOPANT LOSSES; IC FABRICATIONS; JUNCTION LEAKAGES; MOLECULAR IMPLANTS; PROCESS EQUIVALENCES; RESIST REMOVALS; SOURCE/DRAIN EXTENSIONS;

TECHNICAL PRESENTATIONS;

EID: 47649132396     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IWJT.2007.4279961     Document Type: Conference Paper

References (16)

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