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Volumn 112, Issue 13, 2008, Pages 5185-5189

Hall mobility measurements and chemical stability of ultrathin, methylated Si(111)-on-insulator films

Author keywords

[No Author keywords available]

Indexed keywords

INSULATOR FILMS; MOBILITY MEASUREMENTS; SI (111);

EID: 47249141344     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp710482t     Document Type: Article
Times cited : (6)

References (35)
  • 26
    • 47249145124 scopus 로고    scopus 로고
    • The rectangular bar width was smaller than our XPS spot size and so could not be directly imaged without the addition of significant signal from the surrounding oxide support
    • The rectangular bar width was smaller than our XPS spot size and so could not be directly imaged without the addition of significant signal from the surrounding oxide support.
  • 28
    • 47249087733 scopus 로고    scopus 로고
    • Solvents included acetone, isopropyl alcohol, methanol, anisole, methyl-isobutyl ketone, methyl-ethyl ketone, chlorobenzene, tetrahydrofuran, acetonitrile, ethyl lactate, and n-methyl-2-pyrrolidone.
    • Solvents included acetone, isopropyl alcohol, methanol, anisole, methyl-isobutyl ketone, methyl-ethyl ketone, chlorobenzene, tetrahydrofuran, acetonitrile, ethyl lactate, and n-methyl-2-pyrrolidone.
  • 31
    • 47249163682 scopus 로고    scopus 로고
    • The etch rate was observed to depend on the doping (higher for n-type) but was not measured conclusively. Reference 1 indirectly measured the etch rate to be ∼1 nm/min.
    • The etch rate was observed to depend on the doping (higher for n-type) but was not measured conclusively. Reference 1 indirectly measured the etch rate to be ∼1 nm/min.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.