Vertical micromirrors integrated with electromagnetic microactuators for two-dimensional optical matrix switches

IEEE Photonics Technology Letters

Volumn 17, Issue 9, 2005, Pages 1860-1862

  Su, Guo Dung John ^a   Chiu, Chen Wei ^a   Jiang, Fukang ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Umachines Inc   (United States)

Author keywords

Electromagnetic force; Free space; Low voltage; Optical cross connect switches; Optical microelectromechanical systems (MEMS); Vertical micromirrors

Indexed keywords

ELECTRIC POTENTIAL; INSERTION LOSSES; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MIRRORS; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

ELECTROMAGNETIC FORCE; OPTICAL CROSS CONNECT SWITCHES; OPTICAL MICROELECTROMECHANICAL SYSTEMS (MEMS); VERTICAL MICROMIRRORS;

OPTICAL SWITCHES;

EID: 27144527240     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.852642     Document Type: Article

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