Reliability of a MEMS actuator improved by spring corner designs and reshaped driving waveforms

Sensors

Volumn 7, Issue 9, 2007, Pages 1720-1730

  Hsieh, Hsin Ta ^a   Su, Guo Dung John ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Driving waveform; Electromagnetic force; High reliability; Spring corner designs; Stress

Indexed keywords

ACTUATORS; MACHINE DESIGN; MECHANICAL ACTUATORS; MICROACTUATORS; NATURAL FREQUENCIES; RELIABILITY; SERPENTINE; SILICATE MINERALS; STRESS CONCENTRATION; STRESSES;

DRIVING WAVEFORMS; ELECTROMAGNETIC FORCES; GRAVITY ACCELERATION; HIGH RELIABILITY; HIGH STRESS CONCENTRATION; MEMS (MICROELECTRO-MECHANICAL-SYSTEM); RELIABILITY PERFORMANCE; SMALL DISPLACEMENT;

MEMS;

EID: 34948881253     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7091720     Document Type: Article

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